Friction mechanism of zinc oxide films prepared by atomic layer deposition
Author:
Affiliation:
1. The State Key Laboratory of Tribology
2. Tsinghua University
3. Beijing 100084
4. China
5. National Engineering Research Center for Nanotechnology
6. Shanghai 200241
Abstract
Mechanism of low friction coefficients of zinc oxide (ZnO) films is plastic deformation induced nanocrystal structure to amorphous structure transformation.
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2015/RA/C5RA05355B
Reference24 articles.
1. Recent progress in processing and properties of ZnO
2. A comprehensive review of ZnO materials and devices
3. Tribological behavior of nanocrystalline zinc oxide films
4. Microstructural evolution in lubricious ZnO films grown by pulsed laser deposition
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