Surface modification and functionalization of powder materials by atomic layer deposition: a review-Reference-Cited by-同舟云学术

Surface modification and functionalization of powder materials by atomic layer deposition: a review

Published:2021 Issue:20 Volume:11 Page:11918-11942
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Hu Yiyun¹²³⁴⁵^ORCID,Lu Jian⁶²³⁴^ORCID,Feng Hao¹²³⁴⁵^ORCID

Affiliation:

1. Science and Technology on Combustion and Explosion Laboratory

2. Xi'an Modern Chemistry Research Institute

3. Xi'an

4. PR China

5. Laboratory of Material Surface Engineering and Nanofabrication

6. State Key Laboratory of Fluorine and Nitrogen Chemicals

Abstract

Atomic layer deposition is a technique where gaseous precursors are used to form materials via self-limiting surface reactions. This allows conformal deposition materials on a high surface area support at the atomic level, and materials can by precisely constructed.

Funder

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2021/RA/D1RA00326G

Reference154 articles.

1. Progress in Powder Coating Technology Using Atomic Layer Deposition

2. Atomic Layer Deposition: An Overview

3. Functionalization of fine particles using atomic and molecular layer deposition