1. Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany
2. Kazan Federal University, Institute of Physics, 18 Kremlevskaja str., Kazan, 420008, Russia
3. Laboratory of Electron Microscopy, Karlsruhe Institute of Technology, Engesserstrasse 7, D-76131 Karlsruhe, Germany
4. Department of Chemistry and RECETOX, Masaryk University, Kamenice 5, 625 00 Brno, Czech Republic
5. Light Technology Institute (LTI), Karlsruhe Institute of Technology, Engesserstrasse 13, 76131 Karlsruhe, Germany