1. Institute of Microstructure TechnologyKarlsruhe Institute of Technology Hermann‐von‐Helmholtz‐Platz 1 76344 Eggenstein‐Leopoldshafen Germany
2. Light Technology InstituteKarlsruhe Institute of Technology Engesserstrasse 13 76131 Karlsruhe Germany
3. Laboratory for Electron MicroscopyKarlsruhe Institute of Technology Engesserstrasse 7 76131 Karlsruhe Germany