Large-size free-standing single-crystal β-Ga2O3 membranes fabricated by hydrogen implantation and lift-off-Reference-Cited by-同舟云学术

Large-size free-standing single-crystal β-Ga2O3 membranes fabricated by hydrogen implantation and lift-off

Published:2021 Issue: Volume: Page:
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Zheng Yixiong¹²³⁴⁵,Feng Zixuan⁶⁷⁸⁵,Bhuiyan A. F. M. Anhar Uddin⁶⁷⁸⁵^ORCID,Meng Lingyu⁶⁷⁸⁵,Dhole Samyak¹²³⁴⁵,Jia Quanxi¹²³⁴⁵,Zhao Hongping⁶⁷⁸⁵⁹,Seo Jung-Hun¹²³⁴⁵^ORCID

Affiliation:

1. Department of Materials Design and Innovation

2. University at Buffalo

3. The State University of New York

4. Buffalo

5. USA

6. Department of Electrical and Computer Engineering

7. The Ohio State University

8. Columbus

9. Department of Materials Science and Engineering

Abstract

This paper reports the first successful demonstration of large-size free-standing single-crystal β-Ga₂O₃ NMs fabricated by the hydrogen implantation and lift-off process directly from MOCVD grown β-Ga₂O₃ epifilms on native substrates.

Funder

National Science Foundation

Air Force Office of Scientific Research

University at Buffalo

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2021/TC/D1TC00682G

Reference42 articles.

1. Intrinsic electron mobility limits inβ-Ga2O3