1. Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
2. University of Chinese Academy of Sciences, Beijing 100049, China
3. Key Laboratory of Polar Materials and Devices (MOE) and Department of Electronics, East China Normal University, Shanghai 200241, China
4. Key Laboratory of Science and Technology on Space Energy Conversion, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China