Directed self-assembly of a high-chi block copolymer for the fabrication of optical nanoresonators
Author:
Affiliation:
1. Laboratory of Photonics
2. Tampere University of Technology
3. Finland
4. Department of Micro and Nanotechnology
5. Technical University of Denmark
6. Lyngby
7. Denmark
8. Center for Nanostructured Graphene
Abstract
In this paper, we report on the fabrication of optical nanoresonators using block copolymer lithography.
Funder
Tampereen Teknillinen Yliopisto
Danmarks Tekniske Universitet
Publisher
Royal Society of Chemistry (RSC)
Subject
General Materials Science
Link
http://pubs.rsc.org/en/content/articlepdf/2018/NR/C8NR05831H
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