1. Inorganic Materials Chemistry, Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany
2. Tyndall National Institute, University College Cork, Lee Maltings, Cork T12 R5CP, Ireland
3. Chair of Microsystems Technology, Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany
4. RUBION, Ruhr University Bochum, Universitätsstr. 150, 44801 Bochum, Germany