Automated solvent vapor annealing with nanometer scale control of film swelling for block copolymer thin films
Author:
Affiliation:
1. Nanophotonics
2. Faculty of Engineering and Natural Sciences
3. Tampere University
4. 33101 Tampere
5. Finland
6. Tampere Microscopy Center
Abstract
A computer-controlled solvent annealing method for BCP self-assembly was developed in this work. With optimized film swelling, the annealing time is drastically reduced and self-assembly of high-molecular weight BCPs is achieved in minutes.
Funder
Suomen Akatemia
Tampereen Yliopisto
Publisher
Royal Society of Chemistry (RSC)
Subject
Condensed Matter Physics,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2019/SM/C9SM01322A
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