Dissociative electron attachment to Pt(PF3)4—a precursor for Focused Electron Beam Induced Processing (FEBIP)
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://pubs.rsc.org/en/content/articlepdf/2012/CP/C2CP23268E
Reference24 articles.
1. Gas-assisted focused electron beam and ion beam processing and fabrication
2. Approach to optimizing n-SiC Ohmic contacts by replacing the original contacts with a second metal
3. Low-Energy Electron-Induced Decomposition and Reactions of Adsorbed Tetrakis(trifluorophosphine)platinum [Pt(PF3)4]
4. Laser Photochemistry at Surfaces—Laser-Induced Chemical Vapor Deposition and Related Phenomena
5. Electron scattering in Pt(PF3)4: Elastic scattering, vibrational, and electronic excitation
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