Magnetically enhanced plasma coating of nanostructures with ultrathin diamond-like carbon films-Reference-Cited by-同舟云学术

Magnetically enhanced plasma coating of nanostructures with ultrathin diamond-like carbon films

Published:2014 Issue:51 Volume:4 Page:26635-26644
ISSN:2046-2069
Container-title:RSC Adv.
language:en
Short-container-title:RSC Adv.

Author:

Beard J. D.¹²³,Aleksandrov S.⁴⁵,Walker C. H.⁴⁵,Wolverson D.¹²³,Mitchels J. M.⁶²³,Gordeev S. N.¹²³

Affiliation:

1. Department of Physics

2. University of Bath

3. Bath, UK

4. Diamond Hard Surfaces Ltd

5. Towcester, UK

6. Microscopy and Analysis Suite

Abstract

Coating using magnetically enhanced plasma deposition gives smooth diamond-like carbon films that increase hardness and wear resistance of nanostructures.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2014/RA/C4RA02841D

Reference56 articles.

1. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon

2. Subplantation model for film growth from hyperthermal species: Application to diamond

3. Tetrahedral bonding in amorphous carbon

4. Characterization of AFM cantilevers coated with diamond-like carbon

5. Deposition parameters and film properties of hydrogenated amorphous silicon prepared by high rate dc planar magnetron reactive sputtering

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modification of optical and mechanical properties of nitrogen doped diamond-like carbon layers;Journal of Materials Science: Materials in Electronics;2019-10-14

2. Direct observation of thickness and foreign interlayer driven abrupt structural transformation in ultrathin carbon and hybrid silicon nitride/carbon films;Carbon;2017-05

3. The role of substrate bias and nitrogen doping on the structural evolution and local elastic modulus of diamond-like carbon films;Journal of Physics D: Applied Physics;2017-03-31

4. Interpretation of friction and wear in DLC film: role of surface chemistry and test environment;Journal of Physics D: Applied Physics;2016-10-07

5. The importance of ions in low pressure PECVD plasmas;Frontiers in Physics;2015-02-04