Deposition of MoSe2 flakes using cyclic selenides

Author:

Charvot Jaroslav12345,Zazpe Raul62345,Krumpolec Richard7891011,Rodriguez-Pereira Jhonatan62345ORCID,Pavliňák David7891011ORCID,Pokorný Daniel12345,Klikar Milan12345,Jelínková Veronika12135,Macak Jan M.62345ORCID,Bureš Filip12345ORCID

Affiliation:

1. Institute of Organic Chemistry and Technology

2. Faculty of Chemical Technology

3. University of Pardubice

4. Pardubice

5. Czech Republic

6. Center of Materials and Nanotechnologies

7. Department of Physical Electronics

8. CEPLANT—R&D Center for Plasma and Nanotechnology Surface Modifications

9. Faculty of Science

10. Masaryk University

11. 61137 Brno

12. The Institute of Technology and Business in České Budějovice

13. České Budějovice

Abstract

Diselenadisiletanes possess easy preparation, tailored stability, reactivity, volatility and fast exchange ALD reaction to afford MoSe2 flakes of high quality.

Funder

Ministerstvo Školství, Mládeže a Tělovýchovy

Grantová Agentura České Republiky

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Reference25 articles.

1. Atomic Layer Deposition of Two-Dimensional Layered Materials: Processes, Growth Mechanisms, and Characteristics

2. S. M. George , B.Yoon , R. A.Hall , A. I.Abdulagatov , Z. M.Hibbs , Y.Lee , D.Seghete and B. H.Lee , Atomic Layer Deposition of Nanostructured Materials , Wiley-VCH Verlag GmbH & Co. KGaA , 2012

3. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

4. One-dimensional anodic TiO2 nanotubes coated by atomic layer deposition: Towards advanced applications

5. M. Mattinen , Atomic Layer Deposition of Two-Dimensional Metal Dichalcogenides , University of Helsinki , 2020

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