Growth of epitaxial zirconium-doped indium oxide (222) at low temperature by rf sputtering
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2010/CE/C004452K
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1. Preparation of In2O3 and tin-doped In2O3 films by a novel activated reactive evaporation technique
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3. Micrograin structure influence on electrical characteristics of sputtered indium tin oxide films
4. Comparative studies of transparent conductive Ti-, Zr-, and Sn-doped In2O3 using a combinatorial approach
5. Deposition by magnetron sputtering and characterization of indium tin oxide thin films
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