Damage and recovery induced by a high energy e-beam in a silicon nanofilm
Author:
Affiliation:
1. Beijing Key Lab of Microstructure and Property of Advanced Material
2. Institute of Microstructure and Property of Advanced Materials
3. Beijing University of Technology
4. Beijing 100124
5. China
Abstract
Herein, electron beam-induced damage and recovery of a silicon thin film was investigatedin situ viatransmission electron microscopy (TEM).
Funder
National Natural Science Foundation of China
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2017/RA/C7RA04997H
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1. Carbon onions as nanoscopic pressure cells for diamond formation
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4. Creation of Individual Vacancies in Carbon Nanotubes by Using an Electron Beam of 1 Å Diameter
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