Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication-Reference-Cited by-同舟云学术

Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication

Published:2018 Issue:37 Volume:10 Page:17494-17511
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Bazaka K.¹²³⁴⁵^ORCID,Baranov O.⁶⁷⁸⁹¹⁰,Cvelbar U.⁹¹⁰¹¹¹²^ORCID,Podgornik B.¹³¹¹¹²,Wang Y.¹⁴¹⁵¹⁶¹⁷¹⁸,Huang S.¹⁹²⁰²¹²²²³,Xu L.¹⁹²⁰²¹²²²³,Lim J. W. M.¹⁹²⁰²¹²²²³,Levchenko I.¹⁹²⁰²¹²²²³^ORCID,Xu S.¹⁹²⁰²¹²²²³

Affiliation:

1. School of Chemistry

2. Physics

3. Mechanical Engineering

4. Queensland University of Technology

5. Brisbane

6. National Aerospace University “KhAI”

7. Kharkov

8. Ukraine

9. Department for Surface Engineering and Optoelectronics

10. Jožef Stefan Institute

11. Ljubljana

12. Slovenia

13. Institute of Metals and Technology

14. Department of Physics

15. School of Science

16. Hangzhou Dianzi University

17. Hangzhou 310018

18. China

19. Plasma Sources and Applications Centre

20. NIE

21. and Institute of Advanced Studies

22. Nanyang Technological University

23. Singapore

Abstract

Oxygen plasmas feature certain properties that make them attractive not only for material removal via etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces.

Funder

Javna Agencija za Raziskovalno Dejavnost RS

Horizon 2020

Queensland University of Technology

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2018/NR/C8NR06502K

Reference129 articles.

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