Effective intensity distributions used for direct laser interference exposure

Author:

Xu Jia12345,Wang Zuobin67859,Zhang Ziang6785,Wang Dapeng67859,Weng Zhankun6785

Affiliation:

1. Changchun Institute of Optics

2. Fine Mechanics and Physics

3. Chinese Academy of Sciences

4. Changchun 130033

5. China

6. CNM & JR3CN

7. Changchun University of Science and Technology

8. Changchun 130022

9. JR3CN & IRAC

Abstract

Effective intensity distributions are used for direct multi-beam interference by controlling the exposure beam intensities.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Reference28 articles.

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