Control of pressure-driven components in integrated microfluidic devices using an on-chip electrostatic microvalve
Author:
Affiliation:
1. Department of Chemical & Biomolecular Engineering
2. University of Illinois at Urbana-Champaign
3. Urbana, USA
4. Sandia National Laboratories
5. Albuquerque, USA
6. Department of Chemical & Nuclear Engineering
7. University of New Mexico
Abstract
We report an electrostatic microvalve and microfluidic “pressure-amplifier” circuits used to regulate pressure-driven components (e.g., microvalves) in microfluidic systems.
Funder
NSF Office of the Director
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2014/RA/C4RA10341F
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