Predicting low-k zeolite materials-Reference-Cited by-同舟云学术

Predicting low-k zeolite materials

Published:2014 Issue:13 Volume:2 Page:2298-2300
ISSN:2050-7526
Container-title:J. Mater. Chem. C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Poloni Roberta¹²³⁴,Kim Jihan⁵⁶⁷

Affiliation:

1. Laboratoire de Science et Ingénierie des Matériaux et Procédés (SIMaP)

2. CNRS UMR5266

3. Grenoble-INP

4. 38402 Saint Martin d'H'ères Cedex, France

5. Department of Chemical and Biomolecular Engineering

6. Korea Advanced Institute of Science and Technology (KAIST)

7. Korea

Abstract

The IZA and the hypothetical pure-silica zeolite structures are investigated theoretically to identify optimal dielectric materials for semiconducting device applications.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2014/TC/C3TC32358G

Reference19 articles.

1. Pure-Silica Zeolite Low-k Dielectric Thin Films

2. Correlation between the dielectric constant and porosity of nanoporous silica thin films deposited by the gas evaporation technique

3. Mechanical and Dielectric Properties of Pure-Silica-Zeolite Low-k Materials

4. Computer simulated dense-random packing models as approach to the structure of porous low-k dielectrics

5. Pure-silica LTA, CHA, STT, ITW, and -SVR thin films and powders for low-k applications

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