Hydrogen-induced mitigation of O on Ru(101̄0): a density-functional study
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://pubs.rsc.org/en/content/articlepdf/2009/CP/B903099A
Reference50 articles.
1. Surface phenomena related to mirror degradation in extreme ultraviolet (EUV) lithography
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4. Interaction of gas‐phase atomic deuterium with the Ru(001)–p(1×2)–O surface: Kinetics of hydroxyl and water formation
5. Contamination removal from EUV multilayer using atomic hydrogen generated by heated catalyzer
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1. Vacuum ultraviolet enhanced atomic layer etching of ruthenium films;Journal of Vacuum Science & Technology A;2021-01
2. Structure and energetics of ultrathin Cu adlayers on Ru(1 0 1¯ 0);Applied Surface Science;2018-10
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