Low-temperature dry etching of metal oxides and ZnS via formation of volatile metal β-diketonate complexes-Reference-Cited by-同舟云学术

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Low-temperature dry etching of metal oxides and ZnS via formation of volatile metal β-diketonate complexes

Published:1992 Issue:8 Volume:2 Page:893-894
ISSN:0959-9428
Container-title:J. Mater. Chem.
language:en
Short-container-title:J. Mater. Chem.

Author:

Rousseau Francois,Jain Ajay,Kodas Toivo T.,Hampden-Smith Mark,Farr J. Doug,Muenchausen Ross

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/1992/JM/JM9920200893

Reference21 articles.

1. A. R. West , in Solid Stale Chemistry and Its Applications, Wiley, 1989.

2. Ferroelectric Thin Films, ed. E. R. Meyers and A. I. Kingon. Materials Research Society, Pittsburg PA, 1990, vol. 200.

3. Ceramic Transactions: Ferroelectric Films, ed. A. S. Bhalia and K. M. Nair, American Ceramic Society, Westerville OH, 1992, vol. 25.

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