Visualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of concept-Reference-Cited by-同舟云学术

Visualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of concept

Published:2019 Issue:73 Volume:55 Page:10864-10867
ISSN:1359-7345
Container-title:Chemical Communications
language:en
Short-container-title:Chem. Commun.

Author:

Abrenica Graniel Harne A.¹²³⁴⁵^ORCID,Lebedev Mikhail V.⁶⁷⁸^ORCID,Pacco Antoine⁵³⁴^ORCID,Calvet Wolfram⁹¹⁰¹¹¹²,Mayer Thomas⁹¹⁰¹¹¹²^ORCID,van Dorp Dennis H.⁵³⁴

Affiliation:

1. Department of Chemistry

2. Katholieke Universiteit Leuven

3. B-3001 Leuven

4. Belgium

5. Imec

6. Ioffe Institute

7. St. Petersburg

8. Russia

9. Institute of Materials Science

10. Darmstadt University of Technology

11. Darmstadt

12. Germany

Abstract

We study the anisotropy in surface oxidation for Ge(100) and (110) in HCl/H₂O₂ solution complemented by synchrotron X-ray photoemission spectroscopy (SXPS) measurements integrated with an in situ etching chamber.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,General Chemistry,Ceramics and Composites,Electronic, Optical and Magnetic Materials,Catalysis

Link

http://pubs.rsc.org/en/content/articlepdf/2019/CC/C9CC05376J

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