Ultra-large suspended graphene as a highly elastic membrane for capacitive pressure sensors-Reference-Cited by-同舟云学术

Ultra-large suspended graphene as a highly elastic membrane for capacitive pressure sensors

Published:2016 Issue:6 Volume:8 Page:3555-3564
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Chen Yu-Min¹²³⁴²,He Shih-Ming¹²³,Huang Chi-Hsien⁵⁶⁷,Huang Cheng-Chun⁴⁸⁹,Shih Wen-Pin⁴⁸⁹,Chu Chun-Lin¹⁰¹¹,Kong Jing¹²¹³¹⁴,Li Ju¹⁵¹³¹⁴,Su Ching-Yuan¹²³⁴²

Affiliation:

1. Graduate Institute of Energy Engineering

2. National Central University

3. Tao-Yuan 32001, Taiwan

4. Dep. of Mechanical Engineering

5. Dep. of Materials Engineering

6. Ming Chi University of Technology

7. New Taipei City 24301, Taiwan

8. National Taiwan University

9. Taipei City 10617, Taiwan

10. National Nano Device Laboratories

11. Hsinchu, Taiwan

12. Department of Electrical Engineering and Computer Sciences

13. Massachusetts Institute of Technology

14. Cambridge, USA

15. Department of Nuclear Science and Engineering and Department of Materials Science and Engineering

Abstract

We prepared ultra-large suspended graphene membranes (up to 1.5 mm) through solvent replacement, followed by thermal decomposition. A capacitive pressure sensor was fabricated, which showed a linear response and high sensitivity of 15.15 aF Pa⁻¹.

Funder

NSF Office of the Director

Ministry of Science and Technology, Taiwan

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2016/NR/C5NR08668J

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