Fabrication of mesoporous organosilica in a shallow nanotrench for low-k and high elastic modulus material application
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Materials Chemistry,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2012/JM/C2JM34994A
Reference25 articles.
1. Periodic Mesoporous Organosilicas Containing Interconnected [Si(CH 2 )] 3 Rings
2. Nanoporous Ultralow Dielectric Constant Organosilicates Templated by Triblock Copolymers
3. SBA-15 filled polybenzoxazine nanocomposites for low-k dielectric applications
4. Fracture of nanoporous thin-film glasses
5. Low Dielectric Constant Materials
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