Bis(β-diketonato)- and allyl-(β-diketonato)-palladium(ii) complexes: synthesis, characterization and MOCVD application
Author:
Affiliation:
1. Technische Universität Chemnitz
2. Faculty of Natural Sciences
3. Institute of Chemistry
4. Inorganic Chemistry
5. 09107 Chemnitz
6. Center for Microtechnologies
7. Germany
8. Fraunhofer Institute for Electronic Nano Systems (ENAS)
Abstract
Halogen-free allyl- and β-diketonate-functionalized Pd(ii) compounds were synthesized and successfully applied as MOVCD precursors for Pd and PdO thin film formation.
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2016/RA/C6RA22887A
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