Capacitive pressure sensing with suspended graphene–polymer heterostructure membranes-Reference-Cited by-同舟云学术

Capacitive pressure sensing with suspended graphene–polymer heterostructure membranes

Published:2017 Issue:44 Volume:9 Page:17439-17449
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Berger Christian¹²³⁴^ORCID,Phillips Rory¹²³⁴^ORCID,Centeno Alba⁵⁶⁷^ORCID,Zurutuza Amaia⁵⁶⁷^ORCID,Vijayaraghavan Aravind¹²³⁴^ORCID

Affiliation:

1. School of Materials and National Graphene Institute

2. University of Manchester

3. Manchester

4. UK

5. Graphenea S.A.

6. 20018 Donostia-San Sebastián

7. Spain

Abstract

We describe the fabrication and characterisation of a capacitive pressure sensor formed by an ultra-thin graphene–polymer heterostructure membrane spanning a large array of micro-cavities each up to 30 μm in diameter with 100% yield.

Funder

Engineering and Physical Sciences Research Council

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2017/NR/C7NR04621A

Reference63 articles.

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