Adsorption of iii/v ions (In(iii), Ga(iii) and As(v)) onto SiO2, CeO2 and Al2O3 nanoparticles used in the semiconductor industry-Reference-Cited by-同舟云学术

Adsorption of iii/v ions (In(iii), Ga(iii) and As(v)) onto SiO2, CeO2 and Al2O3 nanoparticles used in the semiconductor industry

Published:2016 Issue:5 Volume:3 Page:1014-1026
ISSN:2051-8153
Container-title:Environmental Science: Nano
language:en
Short-container-title:Environ. Sci.: Nano

Author:

Bi Xiangyu¹²³⁴,Westerhoff Paul¹²³⁴

Affiliation:

1. School of Sustainable Engineering and The Built Environment

2. Arizona State University

3. Tempe

4. USA

Abstract

The semiconductor industry annually uses thousands of tons of nanoparticles (NPs) in chemical mechanical polishing (CMP) processes.

Funder

Semiconductor Research Corporation

Environmental Protection Agency

Division of Engineering Education and Centers

Division of Chemical, Bioengineering, Environmental, and Transport Systems

Publisher

Royal Society of Chemistry (RSC)

Subject

General Environmental Science,Materials Science (miscellaneous)

Link

http://pubs.rsc.org/en/content/articlepdf/2016/EN/C6EN00184J

Reference62 articles.

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2. Industrial production quantities and uses of ten engineered nanomaterials in Europe and the world

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4. Chemical mechanical planarization for microelectronics applications

5. Nanomaterials – the driving force

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