Ultra-high aspect ratio functional nanoporous silicon via nucleated catalysts
Author:
Affiliation:
1. Department of Chemical Engineering
2. University of Waterloo
3. Canada N2L 3G1
4. Department of Materials Science and Engineering
5. Massachusetts Institute of Technology
6. Cambridge
7. USA 02139
Abstract
Large scale, sub-10 nm high aspect ratio nanoporous silicon is fabricatedviascalable sputtering and a solution-based process.
Funder
Natural Sciences and Engineering Research Council of Canada
Deshpande Center, Massachusetts Institute of Technology
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2017/RA/C7RA00562H
Reference64 articles.
1. Electrolytic Shaping of Germanium and Silicon
2. A Planar Nanoporous Silicon Metal-Semiconductor-Metal Visible Light Photodetector
3. Characterization of Nanoporous Silicon-Based DNA Biosensor for the Detection of Salmonella Enteritidis
4. Nanoporous anti-fouling silicon membranes for biosensor applications
5. Functionalized silicon membranes for selective bio-organism capture
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