Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale
Author:
Affiliation:
1. Molecular Foundry
2. Lawrence Berkeley National Laboratory
3. Berkeley
4. USA
5. Ilmenau Univ. of Technology
6. Dept. of Micro- and Nanoelectronic Systems
7. 98684
8. Germany
Abstract
A new composite sample preparation method for high contrast cross-sectional SEM imaging.
Funder
U.S. Department of Energy
Seventh Framework Programme
Publisher
Royal Society of Chemistry (RSC)
Subject
General Materials Science
Link
http://pubs.rsc.org/en/content/articlepdf/2018/NR/C8NR06669H
Reference54 articles.
1. P. W. Hawkes and J. C. H.Spence , Science of Microscopy , Springer Science+Business Media , LLC , New York, 2007 , vol. I
2. The scanning electron microscope and its fields of application
3. J. Goldstein , D.Newbury , D.Joy , C.Lyman , P.Echlin , E.Lifshin , L.Sawyer and J.Michael , Scanning Electron Microscopy and X-Ray Microanalysis , Springer Science+Business Media , New York , 3rd edn., 2007
4. Low voltage scanning electron microscopy
5. The theory and practice of high-resolution scanning electron microscopy
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