Epitaxial graphene growth on cubic silicon carbide on silicon with high temperature neutron reflectometry: an operando study

Author:

Pradeepkumar Aiswarya12ORCID,Cortie David34ORCID,Smyth Erin3ORCID,Le Brun Anton P.3ORCID,Iacopi Francesca124ORCID

Affiliation:

1. School of Electrical and Data Engineering, Faculty of Engineering and Information Technology, University of Technology Sydney, Sydney, New South Wales, 2007, Australia

2. ARC Centre of Excellence for Transformative Meta-Optical Systems, University of Technology Sydney, New South Wales, 2007, Australia

3. Australian Centre for Neutron Scattering, Australian Nuclear Science and Technology Organization, New Illawarra Road, Lucas Heights, New South Wales 2234, Australia

4. ARC Centre of Excellence in Future Low-Energy Electronics Technologies, Melbourne, Victoria, 3800, Australia

Abstract

High-temperature operando neutron reflectometry of Ni/Cu-mediated graphene growth on 3C–SiC shows (1) formation of a metal alloy, (2) nickel silicidation releasing atomic carbon, and (3) formation of graphene at 1100 °C in liquid phase.

Funder

Australian Research Council

Australian Institute of Nuclear Science and Engineering

Australian Nuclear Science and Technology Organisation

Publisher

Royal Society of Chemistry (RSC)

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