1. Microelectronics Research Unit, Faculty of Information Technology and Electrical Engineering, University of Oulu, FI-90014 Oulu, Finland
2. Laboratory of Industrial Chemistry and Reaction Engineering, Johan Gadolin Process Chemistry Centre, Åbo Akademi University, Henriksgatan 2, Turku/Åbo 20500, Finland
3. Department of Material Science and NanoEngineering, Rice University, Houston, Texas 77005, USA
4. Technical Chemistry, Department of Chemistry, Chemical-Biological Center, Umeå University, SE-90187 Umeå, Sweden