Investigation of phase growth and the effect of thickness on bismuth titanate thin films for microelectronic device applications-Reference-Cited by-同舟云学术

Investigation of phase growth and the effect of thickness on bismuth titanate thin films for microelectronic device applications

Published:2024 Issue:24 Volume:26 Page:3263-3271
ISSN:1466-8033
Container-title:CrystEngComm
language:en
Short-container-title:CrystEngComm

Author:

Thiruramanathan P.¹,Marikani A.²,Manjula S.³,Sadhasivam Sutha⁴,Saravanan S.⁵,Bathula Chinna⁶^ORCID,Lee Sejoon⁷⁸,Lee Youngmin⁷⁸,Kim Deuk Young⁷⁸,Sekar Sankar⁷⁸^ORCID

Affiliation:

1. Department of Physics, Ramco Institute of Technology, Rajapalayam-626117, Tamil Nadu, India

2. Department of Physics, Mepco Schlenk Engineering College, Sivakasi-626005, Tamil Nadu, India

3. Department of Computer Science and Engineering, Ramco Institute of Technology-626 117, Rajapalayam, Tamil Nadu, India

4. Department of chemistry, AMET University, Chennai-603112, Tamil Nadu, India

5. Department of Mechanical Engineering, K. Ramakrishnan College of Technology, Tiruchirappalli-621112, Tamil Nadu, India

6. Division of Electronics and Electrical Engineering, Dongguk University–Seoul, Seoul 04620, Republic of Korea

7. Department of Semiconductor Science, Dongguk University-Seoul, Seoul 04620, Republic of Korea

8. Quantum-functional Semiconductor Research Center, Dongguk University-Seoul, Seoul 04620, Republic of Korea

Abstract

Bismuth titanate (Bi4Ti3O12) thin films were deposited on a platinized silicon (Pt/Ti/SiO2/Si) substrate using a spin-coating technique; they exhibited an excellent dielectric constant of 4228 and a tangent loss of 0.074.

Funder

National Research Foundation of Korea

Publisher

Royal Society of Chemistry (RSC)

Link

http://pubs.rsc.org/en/content/articlepdf/2024/CE/D3CE01264F

Reference27 articles.

1. Security assessment of cross-border electricity interconnections

2. Advanced dielectric polymers for energy storage

3. Natural-superlattice structured CaBi2Nb2O9-Bi4Ti3O12 ferroelectric thin films

4. Adaptation of the Crystal Structure to the Confined Size of Mixed-oxide Nanoparticles

5. A Brief Review of Sodium Bismuth Titanate-Based Lead-Free Materials for Energy Storage: Solid Solution Modification, Metal/metallic Oxide Doping, Defect Engineering and Process Optimizing

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