Author:
Kato Jun,Kakehata Hiroyuki,Maekawa Yasunari,Yamashita Takashi
Publisher
Royal Society of Chemistry (RSC)
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,General Chemistry,Ceramics and Composites,Electronic, Optical and Magnetic Materials,Catalysis
Reference30 articles.
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5. Fabrication of Si single-electron transistors with precise dimensions by electron-beam nanolithography
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