Caulking polydimethylsiloxane molecular networks by thermal chemical vapor deposition of Parylene-C-Reference-Cited by-同舟云学术

Caulking polydimethylsiloxane molecular networks by thermal chemical vapor deposition of Parylene-C

Author:

Liu Yaoping¹²³⁴,Zhang Lingqian¹²³⁴,Mo Chi⁵⁶⁷⁸³,Cao Yanping⁵⁶⁷⁸³,Wu Wengang¹²³⁴⁹,Wang Wei¹²³⁴⁹

Affiliation:

1. Institute of Microelectronics

2. Peking University

3. Beijing

4. China

5. Institute of Biomechanics and Medical Engineering

6. Department of Engineering Mechanics

7. AML

8. Tsinghua University

9. National Key Laboratory of Science and Technology on Micro/Nano Fabrication

Abstract

A t-CVD Parylene technique was advanced to caulk the molecular network of PDMS while retaining its original surface properties.

Funder

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

Biomedical Engineering,General Chemistry,Biochemistry,Bioengineering

Link

Reference52 articles.

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