Metastable Ta2N3 with highly tunable electrical conductivity via oxygen incorporation-Reference-Cited by-同舟云学术

Metastable Ta2N3 with highly tunable electrical conductivity via oxygen incorporation

Published:2021 Issue:6 Volume:8 Page:1744-1755
ISSN:2051-6347
Container-title:Materials Horizons
language:en
Short-container-title:Mater. Horiz.

Author:

Jiang Chang-Ming¹²³⁴^ORCID,Wagner Laura I.¹²³⁴,Horton Matthew K.⁵⁶⁷⁸⁹^ORCID,Eichhorn Johanna¹²³⁴^ORCID,Rieth Tim¹²³⁴,Kunzelmann Viktoria F.¹²³⁴^ORCID,Kraut Max¹²³⁴^ORCID,Li Yanbo¹⁰¹¹¹²¹³^ORCID,Persson Kristin A.⁵⁶⁷⁸⁹^ORCID,Sharp Ian D.¹²³⁴^ORCID

Affiliation:

1. Walter Schottky Institute and Physics Department

2. Technische Universität München

3. 85748 Garching

4. Germany

5. Energy Technologies Area

6. Lawrence Berkeley National Laboratory

7. Berkeley

8. USA

9. Department of Materials Science and Engineering

10. Institute of Fundamental and Frontier Sciences

11. University of Electronic Science and Technology of China

12. Chengdu 610054

13. P. R. China

Abstract

Metastable Ta₂N₃ with bixbyite structure is directly deposited by reactive magnetron sputtering. Concerted experimental and computational efforts reveal the crucial role of oxygen impurity in both the synthesis and in tuning the electronic structure.

Funder

Basic Energy Sciences

H2020 European Research Council

Deutsche Forschungsgemeinschaft

Publisher

Royal Society of Chemistry (RSC)

Subject

Electrical and Electronic Engineering,Process Chemistry and Technology,Mechanics of Materials,General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2021/MH/D1MH00017A

Reference51 articles.

1. Nitride-based semiconductors for blue and green light-emitting devices