1. Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow, 119991, Russia
2. North Caucasus Federal University, Scientific and Laboratory Complex Clean Room, Stavropol, 355017, Russia
3. The Lebedev Physical Institute of the Russian Academy of Sciences, Moscow, 119991, Russia
4. Kotelnikov Institute of Radio-Engineering and Electronics of the Russian Academy of Sciences, Fryazino, 141190, Russia
5. N. P. Ogarev National Research Mordovian State University, Saransk, 430005, Russia