1. Microsystem and Terahertz Research Center
2. China Academy of Engineering Physics
3. Chengdu 610200
4. China
5. Institute of Electronic Engineering
6. Mianyang 621999
7. Institute of Materials
8. Chengdu
9. Chengdu Green Energy and Green Manufacturing Technology R&D Center
10. Chengdu Development Center of Science and Technology
11. College of Electronic Information and Optical Engineering
12. Nankai University
13. Tianjin 300071
14. Beijing Computational Science Research Center
15. Beijing 100193
16. P. R. China