Fabrication of a 2 inch free standing porous GaN crystal film and application in the growth of relaxed crack-free thick GaN
Author:
Affiliation:
1. State Key Laboratory of Crystal Material, Shandong University, Jinan, 250100, PR China
2. School of Microelectronics, Shandong University, Jinan, 250101, PR China
Abstract
Funder
National Natural Science Foundation of China
Key Technology Research and Development Program of Shandong
Shandong University
Publisher
Royal Society of Chemistry (RSC)
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2021/CE/D1CE01032H
Reference46 articles.
1. Recent progress of high-quality GaN substrates by HVPE method
2. Effects of edge dislocations and intentional Si doping on the electron mobility of n-type GaN films
3. Vertical GaN Schottky barrier diodes on Ge-doped free-standing GaN substrates
4. High electron mobility transistor based on a GaN‐AlxGa1−xN heterojunction
5. Over 80% power-added-efficiency GaN high-electron-mobility transistors on free-standing GaN substrates
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