Author:
Yamamoto Takayoshi,Okuda Hiroshi,Takeshita Kohki,Usami Noritaka,Kitajima Yoshinori,Ogawa Hiroki
Abstract
Grazing-incidence small-angle X-ray scattering (GISAXS) measurements with soft X-rays have been applied to Ge nanodots capped with a Si layer. Spatially anisotropic distribution of nanodots resulted in strongly asymmetric GISAXS patterns in theqydirection in the soft X-ray region, which have not been observed with conventional hard X-rays. However, such apparent differences were explained by performing a GISAXS intensity calculation on the Ewald sphere,i.e.taking the curvature of Ewald sphere into account.
Publisher
International Union of Crystallography (IUCr)
Subject
Instrumentation,Nuclear and High Energy Physics,Radiation
Cited by
10 articles.
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