X-ray Rocking-Curve Analysis of Crystals with Buried Amorphous Layers. Case of Ion-Implanted Silicon

Author:

Milita S.,Servidori M.

Publisher

International Union of Crystallography (IUCr)

Subject

General Biochemistry, Genetics and Molecular Biology

Cited by 31 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Convolutional neural network analysis of x-ray diffraction data: strain profile retrieval in ion beam modified materials;Machine Learning: Science and Technology;2023-01-10

2. Estimating the uncertainties of strain and damage analysis by X-ray diffraction in ion implanted MoO3;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2020-09

3. RaDMaX online: a web-based program for the determination of strain and damage profiles in irradiated crystals using X-ray diffraction;Journal of Applied Crystallography;2020-03-25

4. Strain and damage build-up in irradiated crystals: Coupling X-ray diffraction with numerical simulations;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-11

5. Modeling of X-ray rocking curves for layers after two-stage ion-implantation;Semiconductor Physics Quantum Electronics and Optoelectronics;2017-10-09

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