Modeling of kinematic diffraction from a thin silicon film illuminated by a coherent, focused X-ray nanobeam

Author:

Ying Andrew,Osting Braxton,Noyan I. C.,Murray Conal E.,Holt Martin,Maser Jörg

Abstract

A rigorous model of a diffraction experiment utilizing a coherent, monochromatic, X-ray beam, focused by a Fresnel zone plate onto a thin, perfect, single-crystal layer is presented. In this model, first the coherent wave emanating from an ideal zone plate equipped with a direct-beam stop and order-sorting aperture is computed. Then, diffraction of the focused wavefront by a thin silicon film positioned at the primary focal spot is calculated. This diffracted wavefront is propagated to the detector position, and the intensity distribution at the detector plane is extracted. The predictions of this model agree quite well with experimental data measured at the Center for Nanoscale Materials nanoprobe instrument at Sector 26 of the Advanced Photon Source.

Publisher

International Union of Crystallography (IUCr)

Subject

General Biochemistry, Genetics and Molecular Biology

Reference16 articles.

1. Authier, A. (2002). Dynamical Theory of X-ray Diffraction, IUCr Monographs on Crystallography. Oxford University Press.

2. Hard-x-ray microscopy with Fresnel zone plates reaches 40nm Rayleigh resolution

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4. Goodman, J. W. (1996). Introduction to Fourier Optics, McGraw-Hill Series in Electrical and Computer Engineering, 2nd ed. New York: McGraw-Hill.

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