Nanofabrication of high aspect ratio 24 nm x-ray zone plates for x-ray imaging applications-Reference-Cited by-同舟云学术

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Nanofabrication of high aspect ratio 24 nm x-ray zone plates for x-ray imaging applications

Published:2007 Issue:6 Volume:25 Page:2004
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Feng Yan,Feser Michael,Lyon Alan,Rishton Steve,Zeng Xianghui,Chen Sharon,Sassolini Simone,Yun Wenbing

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

Cited by 92 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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4. Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates;Micromachines;2020-03-13

5. Nanofabrication of 50 nm zone plates through e-beam lithography with local proximity effect correction for x-ray imaging*;Chinese Physics B;2020-03-01

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