Evaluation and Analysis Technique Using TEM-Reference-Cited by-同舟云学术

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Evaluation and Analysis Technique Using TEM

Published:2003 Issue:1 Volume:54 Page:21-25
ISSN:0915-1869
Container-title:Journal of the Surface Finishing Society of Japan
language:en
Short-container-title:Journal of The Surface Finishing Society of Japan

Author:

HIROSE Yukinori¹,FUKUMOTO Koji¹

Affiliation:

1. ULSI Development Center, Mitsubishi Electric Corporation

Publisher

The Surface Finishing Society of Japan

Subject

General Engineering

Link

https://www.jstage.jst.go.jp/article/sfj/54/1/54_1_21/_pdf

Reference7 articles.

1. 5) L. R. Herlinger, S. Chevacharoenkul and D. C. Erwin ; Proceedings from the 22^nd International Symposium for Testing and Failure Analysis, 199-205 (1996)

2. 6) T. Ohnishi, H. Koike, T. Ishitani, S. Tomimatsu and K. Umemura ; Proceedings from the 25^th International Symposium for Testing and Failure Analysis, 449-453 (1999)

3. 14) W. R. Rau, P. Schwander, F. H. Baumann, W. Hoppener, and A. Ourmazd ; Phys. Rev. Lett. 82, 2614 (1999)

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