Evaluation of Nanometer Scale Mechanical Properties of Extremely Thin Diamond-Like Carbon (DLC) Films
Author:
Publisher
The Surface Finishing Society of Japan
Subject
General Engineering
Reference18 articles.
1. 1) 榎本祐嗣,三宅正二郎;薄膜トライボロジー,(東京大学出版会,1994).
2. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon
3. Preparation and properties of highly tetrahedral hydrogenated amorphous carbon
4. 4) S. Miyake ; J. Vac. Soc., 47, (12), 811 (2004) (in Japanese).
5. Nanometer Scale Mechanical Properties of DLC Films Deposited by Filtered Cathodic Vadilum Arc Ion-plating Method (FCVA)
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1. Modification of Interface Structure between Diamond-Like Carbon Thin Film and Silicon Substrate by RF Bias Sputtering and Analysis of Its Wear Resistance;Journal of The Surface Finishing Society of Japan;2010
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