Nanometer Scale Mechanical Properties of DLC Films Deposited by Filtered Cathodic Vadilum Arc Ion-plating Method (FCVA)-Reference-Cited by-同舟云学术

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Nanometer Scale Mechanical Properties of DLC Films Deposited by Filtered Cathodic Vadilum Arc Ion-plating Method (FCVA)

Published:2004 Issue:10 Volume:55 Page:669-676
ISSN:0915-1869
Container-title:Journal of The Surface Finishing Society of Japan
language:
Short-container-title:Journal of The Surface Finishing Society of Japan

Author:

MIYAKE Shojiro,SAITO Tadashi,YU Keqing,MIKAMI Takashi,OGATA Kiyoshi

Publisher

The Surface Finishing Society of Japan

Subject

General Engineering

Reference17 articles.

1. 1) 榎本祐嗣, 三宅正二郎;薄膜トライボロジー(東京大学出版会, 1994)

2. 2) 三宅正二郎;真空ジャーナル, 85, 11 (2002)

3. 3) 三宅正二郎;NEW DIAMOND, 26, 15 (1992)

4. Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon

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2. Evaluation of protuberance and groove formation in extremely thin DLC films on Si substrates due to diamond tip sliding by atomic force microscopy;Wear;2014-10

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4. 10.3131/jvsj.50.89;Shinku;2007

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