Electrochemical Photoetching of Rolled Shape Memory Alloy Sheets for Microactuators.
Author:
Publisher
The Surface Finishing Society of Japan
Subject
General Engineering
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Film Deposition and Micro-machining of Smart Actuator Materials for MEMS Applications;Journal of The Surface Finishing Society of Japan;2017-07-01
2. Surface Patterning of Al Thin Film Using Photolithography and Anodization;Journal of The Surface Finishing Society of Japan;2008
3. New Electrolyte Solutions for Electrochemical Etching of NiTi Shape Memory Alloy.;Journal of The Surface Finishing Society of Japan;2003
4. Pulse Electrochemical Etching of NiTi Shape Memory Alloy in LiCl-Ethanol Electrolyte;Journal of The Surface Finishing Society of Japan;2003
5. An active guide wire with shape memory alloy bending actuator fabricated by room temperature process;Sensors and Actuators A: Physical;2002-04
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