Evaluation for Surface Cleanness of Metals Washed by the Electrolyzed Alkaline Water
Author:
Publisher
The Surface Finishing Society of Japan
Subject
General Engineering
Reference5 articles.
1. 1) 電解水ガイド, (財)機能水研究振興財団 (2001)
2. Wafer Treatment Using Electrolysis-Ionized Water
3. Future of Functional Water in Surface Finishing Industries. Redox-Ultrapure Water Cleaning for LSI/LCD Manufacturing.
4. Hydrogen particles and supersaturation in alkaline water from an Alkali–Ion–Water electrolyzer
5. 6) 大木建司, 八木和久 ; 洗浄の基礎知識, p. 36 (産業図書, 1993)
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