Theory of wet etcting and its technical trend.
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Published:1988
Issue:11
Volume:35
Page:494-502
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ISSN:1884-3417
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Container-title:Jitsumu Hyomen Gijutsu
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language:ja
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Short-container-title:Jitsumu Hyomen Gijutsu
Publisher
The Surface Finishing Society of Japan
Cited by
1 articles.
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1. 10.4139/sfj.60.232;Journal of The Surface Finishing Society of Japan;2009