Author:
MATSUBARA Masahiro,KONDOH Eiichi
Publisher
The Surface Finishing Society of Japan
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2. Deposition of Cu thin films from supercritical carbon dioxide using hexafluoroacetylacetnatecopper
3. Deposition of Cu and Ru Thin Films in Deep Nanotrenches/Holes Using Supercritical Carbon Dioxide
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5. Reactive Deposition of Conformal Palladium Films from Supercritical Carbon Dioxide Solution
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