Deposition kinetics and narrow-gap-filling in Cu thin film growth from supercritical carbon dioxide fluids
Author:
Publisher
Elsevier BV
Subject
Physical and Theoretical Chemistry,Condensed Matter Physics,General Chemical Engineering
Reference27 articles.
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5. The morphological stability in supercritical fluid chemical deposition of films near the critical point;Louchev;J. Cryst. Growth,1995
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