Surface Modification of Fluoropolymer Using Open-Air Plasma Treatment at Atmospheric Pressure with Ar, Ar+O2, and Ar+H2 for Application in HighAdhesion Metal Wiring Patterns
Author:
Affiliation:
1. Graduate School of Engineering, Osaka University
2. SEKISUI CHEMICAL Co., Ltd.
Publisher
The Surface Finishing Society of Japan
Subject
General Engineering
Link
https://www.jstage.jst.go.jp/article/sfj/69/4/69_155/_pdf
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1. Electron irradiation of poly(tetrafluoroethylene): effect on adhesion and comparison with x-rays
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1. Soft X-ray microspectroscopic imaging studies of exfoliated surface between fluoropolymer and Cu plate directly bonded by plasma irradiation with ammonia gas;Journal of Electron Spectroscopy and Related Phenomena;2023-08
2. Open-air-type Ar + H2O plasma treatment of polytetrafluoroethylene for improving Ag/PTFE adhesion strength: application to highly adhesive Ag direct wiring patterns;Japanese Journal of Applied Physics;2020-06-30
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